By G. K. Ananthasuresh, K. J. Vinoy, S. Gopalakrishnan, K. N. Bhat, V. K. Aatre
This primary undergraduate-level textbook on Microsystems and clever platforms makes a burgeoning zone perform available to direction teaching. it really is in accordance with a path brought at VTU in India in 2009, which has already been taught to just about a thousand students.
Practical examples and workouts will set this ebook except the pro reference books at present in use as texts at the subject.
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Extra resources for Micro and Smart Systems: Technology and Modeling
1 mm exists between the resonator and the rigid beam laid Resonator Anchor perpendicular to it. As a result, the resonator vibrates at the frequency of the ac signal applied to it with respect to the rigid beam and a current flows due to the capacitance variation with time. This current peaks when the frequency of the input signal matches with Electrodes Rigid beam the mechanical resonance frequency of the vibrating beam. 5 Schematic of a resonator beam . used as a filter. 4 Smart Materials, Structures and Systems b 7 Until about the 1990s, most microsystems devices with various sensing or actuating mechanisms were fabricated using silicon bulk micromachining, surface micromachining, and micromolding processes.
Competitors to electrostatic comb-drive at the microscale are: 1. Piezoelectric actuators: In these, the force is generated by piezoelectric materials that develop mechanical strain upon application of voltage. They can generate a large force but very low displacement. They are hard to microfabricate. Also, they require large voltages for actuation. 2. Electrothermal actuators: These work on the principle of mismatched thermal expansion because of different materials or specific shapes. They are capable of generating a large force and can be designed to have large displacements, require low voltages to actuate, and are easy to build.
4. Parallel-plate capacitor: a pair of parallel plates separated by a dielectric (nonconducting substance) medium. 5. Differential capacitance arrangement: in this arrangement, there are three plates with a movable middle plate. As the plate moves, the capacitance between one of the pairs will increase while that of the other decreases. This gives a signal that is linearly proportional to the applied acceleration, and hence is the preferred configuration. 6. Quality factor: a system’s quality factor, Q, describes the sharpness of the system’s dynamic response.