Microelectronics

High Density Plasma Sources. Design, Physics and Performance by Oleg A. Popov

By Oleg A. Popov

Content material:
Preface

, Pages vii-xii, Oleg A. Popov
Contributors

, Pages xiii-xiv
1 - Helicon Plasma Sources

, Pages 1-75, Francis F. Chen
2 - Planar Inductive Sources

, Pages 76-99, John C. Forster, John H. Keller
3 - Electrostatically-Shielded Inductively-Coupled RF Plasma Sources

, Pages 100-148, Wayne L. Johnson
4 - Very excessive Frequency Capacitive Plasma Sources

, Pages 149-190, Michael J. Colgan, M. Meyyappan
5 - floor Wave Plasma Sources

, Pages 191-250, Michel Moisan, Joëlle Margot, Zenon Zakrzewski
6 - Microwave Plasma Disk Processing Machines

, Pages 251-311, Jes Asmussen
7 - Electron Cyclotron Resonance Plasma Sources

, Pages 312-379, James E. Stevens
8 - disbursed ECR Plasma Sources

, Pages 380-425, Jacques Pelletier
Index

, Pages 426-445

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Extra resources for High Density Plasma Sources. Design, Physics and Performance

Sample text

P....... ....... .......... 6 o L;] m 0, p rabalip - .. , " <.. """" .. -... ::, --- - ... _-- -- .. '. '. -- .. • ;-- ' .... ~ --, ...... ,. ... / " al ... 20 .. 112 b;J --Bz ....... 8 rI a Figure 14. Computed profiles for Bz,Br, andB{lforthem = 0, +1, and-l modes in uniform and parabolic density distributions. 12 MHz, a = 5 em, and A = 24 em. The eigenvalue a o = a(O) for each case is labeled as Ao and is related to the density on axis by Eq. 4 ,... :: . 3 € -- '" ~ .!!!. -- . , '. .......

24, but there are two added terms in Bz . The small V· j term is due to the displacement current, and the a'j; term gives the effect of the density gradient. The physical effect is apparent here: when there is a current along no', a space charge builds up which must be dissipated by flowing along the magnetic field. This added contribution to t, can either add or subtract from the normal current jz' depending on the sign of m; and this will affect the m > 0 and m < 0 modes differently. The curl of Eq.

34] have varied the antenna length and shape, as shown in Figs. 36 and 37. In this case, an intermediate length of 12 cm, corresponding to a resonant energy of 120 eV, gave the highest density. If an antenna is too long, the phase velocity is too high to be resonant with more than a few electrons; ifthe antenna is too short, coupling efficiency is low because the amplification factor in converting induced Efields to space charge fields, proportional to kl~(, is relatively small. In Fig. 37, the four antenna designs ofFigs.

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