Techniques

Handbook of Thin-Film Deposition Processes and Techniques - by Krishna Seshan

By Krishna Seshan

New moment variation of the preferred ebook on deposition (first variation by way of Klaus Schruegraf) for engineers, technicians, and plant team of workers within the semiconductor and similar industries. This e-book lines the know-how at the back of the surprising progress within the silicon semiconductor and the ongoing pattern in miniaturization during the last two decades. This progress has been fueled largely by way of more advantageous skinny movie deposition suggestions and the advance of hugely really expert apparatus to allow this deposition. The e-book comprises a lot state of the art fabric. solely new chapters on infection and infection regulate describe the fundamentals and the issues??as function sizes cut down to sub-micron dimensions, cleanliness and particle removing has to maintain velocity. a brand new bankruptcy on metrology explains the expansion of refined, computerized instruments able to measuring thickness and spacing of sub-micron dimensions. The booklet additionally covers PVD, laser and e-beam assisted deposition, MBE, and ion beam ways to collect all of the actual vapor deposition suggestions. fullyyt new components obtain complete therapy: chemical mechanical sharpening which is helping reach the flatness that's required by means of glossy lithography tools, and new fabrics used for interconnect dielectric fabrics, in particular natural polyimide fabrics.

Show description

Read or Download Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and Applic PDF

Similar techniques books

Foundations in Comic Book Art: Fundamental Tools and Techniques for Sequential Artists (SCAD Creative Essentials)

A finished consultant to making and constructing comedian e-book and photo novel paintings, from the Savannah collage of artwork and layout (SCAD), one of many world's leaders in sequential arts instruction.

Artists looking the way to holiday into the fascinating international of sequential artwork first have to grasp the instruments, innovations, and behavior utilized by their favourite pencillers, inkers, and electronic artists for developing dynamic, interesting comedian paintings. In Foundations for comedian publication artwork, the Savannah collage of artwork and layout (SCAD)—a top strength in paintings and layout education—enlists one among its most sensible teachers, John Paul Lowe, to supply aspiring comedian e-book makers with an intensive primer for inventive comics, that includes must-know ideas like contour drawing, learning point of view, utilizing photo-reference, and including electronic styles. Examples from the works of SCAD school, alumni, and scholars are paired with Lowe’s easy-to-follow, step by step classes and routines for readers, demonstrating the very important methods all would-be sequential artists need to comprehend sooner than becoming a member of the ranks of the comedian book–making elite.

Else/Where: Mapping — New Cartographies of Networks and Territories

How is it that somebody can price this ebook with just one celebrity? this is often the easiest ebook at the topic mapping i've got noticeable thus far. The content material is extremely conceptual and intensely profound. It grants loads of appealing photographs and well-written essays which illustrate the recommendations offered rather well. a real masterpiece that's splendidly designed and produced.

Advances in Imaging Techniques in Ischemic Heart Disease

In recent times there were super advances in cardiac imaging ideas overlaying the entire spectrum from echocardiography, nuclear cardiology, magnetic resonance imaging to distinction angiography. With admire to those noninvasive and invasive cardiac imaging modalities, marked technological advancements have allowed the heart specialist to imagine the myocardium in a much more subtle demeanour than traditional imaging was once in a position to.

Extra resources for Handbook of Thin-Film Deposition Processes and Techniques - Principles, Methods, Equipment and Applic

Sample text

1 RHEED Oscillation Control ................................ 2 GaAs on Silicon ................................................... 3 Oval Defect Reduction ........................................ 4 Chemical Beam Epitaxy/Gas Source MBE ......... 5 Superlattice Structures ......................................... 0 FUTURE DEVELOPMENTS ....................................... 1 Production Equipment ......................................... 2 In Situ Processing ................................................

2 Electron Beam Annealing of Ion-Implanted Silicon .................................................................. 3 Electron Beam Alloying of Silicides ................... 4 Laser and Electron Beam Recrystallization of Silicon on SiO2 .................................................................... 0 SUMMARY AND CONCLUSIONS ............................ 376 ACKNOWLEDGEMENTS ................................................... 377 REFERENCES ......................................................................

71] Liquid-Phase Epitaxy. LPE[51] is used for the thermally-controlled overgrowth of thin single-crystalline films of compound semiconductors and magnetic garnets from the melt on a single-crystal substrate. This relatively old and simple technique has been successfully applied in the semiconductor industry for fabricating optoelectronic devices. However, compared to MBE, LPE is limited by poor uniformity and surface morphology. Various additional film formation techniques[71] that are used industrially have not been discussed here, since they are essentially thick-film processes.

Download PDF sample

Rated 4.19 of 5 – based on 43 votes