Microelectronics

Handbook of Micro/Nano Tribology by Bharat Bhushan

By Bharat Bhushan

This moment version of guide of Micro/Nanotribology addresses the swift evolution inside of this box, serving as a reference for the beginner and the professional alike. components divide this guide: half I covers uncomplicated reports, and half II addresses layout, development, and purposes to magnetic garage units and MEMS.
Discussions include:

  • surface physics and techniques for bodily and chemically characterizing stable surfaces
  • roughness characterization and static touch versions utilizing fractal analysis
  • sliding on the interface and friction on an atomic scale
  • scratching and put on because of sliding
  • nanofabrication/nanomachining in addition to nano/picoindentation
  • lubricants for minimizing friction and wear
  • surface forces and microrheology of skinny liquid films
  • measurement of nanomechanical homes of surfaces and skinny films
  • atomic-scale simulations of interfacial phenomena
  • micro/nanotribology and micro/nanomechanics of magnetic garage devices
    This accomplished publication includes sixteen chapters contributed by way of greater than 20 foreign researchers. In every one bankruptcy, the presentation starts off with macroconcepts after which result in microconcepts. With greater than 500 illustrations and 50 tables, guide of Micro/Nanotribology covers the variety of suitable issues, together with characterization of good surfaces, size suggestions and purposes, and theoretical modeling of interfaces.

    What's New within the moment version? New chapters on:
  • AFM instrumentation
  • Surface forces and adhesion
  • Design and development of magnetic garage devices
  • Microdynamical units and systems
  • Mechanical homes of fabrics in microstructure
  • Micro/nanotribology and micro/nanomechanics of MEMS devices
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    Additional resources for Handbook of Micro/Nano Tribology

    Example text

    01-nm displacement sensitivity, 10 nN to 1 pN forces are measurable. , 1986a). For further reading, see Rugar and Hansma (1990), Sarid (1991), Sarid and Elings (1991), Binnig (1992), Durig et al. (1992), Frommer (1992), Meyer (1992), Marti and Amrein (1993), and Guntherodt et al. (1995) and dedicated issues of Journal of Vacuum Science Technology (B9, 1991, pp. 401–1211) and Ultramicroscopy (Vols. 42–44, 1992). Lateral forces being applied at the tip during scanning in the contact mode affect roughness measurements (den Boef, 1991).

    Processed data consists of many tens of thousand of points per plane (or data set). The output of the first STM and AFM images were recorded on an X-Y chart recorder, with Z-value plotted against the tip position in the fast-scan direction. Chart recorders have slow response so storage oscilloscopes or computers are used for display of the data. The data are displayed as wire mesh display or gray scale display (with at least 64 shades of gray). ’s Design In the first AFM design developed by Binnig et al.

    27B. 13. Mate et al. 5 to 56 µN) by moving the sample back and forth parallel to the surface plane at a velocity of 40 nm/s, and repeating the scanning by stepping the sample (for three-dimensional profiling). Erlandsson et al. (1988b) measured the atomic-scale friction of muscovite mica. Germann et al. (1993) measured the atomic-scale friction of diamond surfaces. , 1991). 28 (Kaneko, 1988). A diamond tip was held by a parallelleaf spring unit (length = 10 mm, width = 1 mm, thickness = 20 µm, spring constant = 3N/m).

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