Microelectronics

Functional Thin Films and Nanostructures for Sensors: by Anis Zribi, Jeffrey Fortin

By Anis Zribi, Jeffrey Fortin

This booklet discusses advances in sensible skinny motion pictures for sensors and novel suggestions for destiny breakthroughs. the focal point is on guidance and layout principles for sensor structures, interplay among practical skinny motion pictures and different sensor subsystems, basics at the back of the intrinsic performance in sensing skinny motion pictures and nanostructures, state of the art applied sciences used to strengthen sensors this present day and urban examples of sensor designs.

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Soc. 6 Petersen KE (1982) Si as a mechanical material. Proc. IEEE, 70 (5):420–457 Pozhar LA (2000) Structure and dynamics of nanofluids: Theory and simulations to calculate viscosity. Phys Rev E, 61 (2):1432–1446 Scaffardi LB, Tocho JO (2006) Size dependence of refractive index of gold nanoparticles. Nanotechnology, 17:1309–1315 Scaffardi LB, Pellegri N, de Sanctis O, Tocho JO (2005) Sizing gold nanoparticles by optical extinction spectroscopy. Nanotechnology, 16:158–163 Srikar VT, Spearing SM (2003) Materials selection in micromechanical design: An application of the Ashby approach.

Reused with permission from Journal of Vacuum Science and Technology B, 16, 544 (1998), Christopher Harrison, Miri Park, Paul M. Chaikin, Richard A. Register, and Douglas H. Adamson, copyright 1998, AVS The Science and Technology Society) Fig. 11 SEM micrographs of exposed and developed PS template for different annealing times. 5 h, (b) 6 h, (c) 15 h, and (d) 34 h. Lower images have been filtered to enhance edges (Guarini et al. 2001). (Reused with permission from Journal of Vacuum Science and Technology B, 19, 2784 (2001), K.

With the help of this electrode, other materials can be electrochemically plated into the channels. After chemically dissolving the template material, a nanostructure that replicates the template is formed. Many metallic nanorod structures have been fabricated by this method. Note that during the electrochemical plating, one could alternatively change the materials plated into the channel. Thus, multilayered nanorod structures can be fabricated. 3 Growth and Synthesis of Nanostructured Thin Films 45 (a) Nanoporous template (b) Back electrode coating (c) Electroplating desired materials (d) Disolving the template Fig.

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