Microelectronics

Feedback Control of MEMS to Atoms by Jason J. Gorman, Benjamin Shapiro

By Jason J. Gorman, Benjamin Shapiro

Control from MEMS to Atoms illustrates using regulate and keep an eye on structures as a vital a part of functioning built-in structures. The e-book is prepared in response to the dimensional scale of the matter, beginning with micro-scale platforms and finishing with atomic-scale structures. just like macro-scale machines and tactics, regulate structures can play an enormous position in enhancing the functionality of micro- and nano-scale structures and in permitting new services that may in a different way no longer be attainable. notwithstanding, the vast majority of difficulties at those scales current many new demanding situations that transcend the present state of the art on top of things engineering. this can be a results of the multidisciplinary nature of micro/nanotechnology, which calls for the merging of regulate engineering with physics, biology and chemistry.

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Mathematical modelling of high velocity oxygen fuel thermal spraying of nanocrystalline materials: an overview. Modell. Simul. Mater. Sci. , 11:R1–R31, 2003. 6. T. D. Christofides. Nonlinear control of particulate processes. , 45: 1279–1297, 1999. 7. T. D. Christofides. Robust control of particulate processes using uncertain population balances. , 46:266–280, 2000. 8. D. Christofides. Model-based control of particulate processes. Kluwer Academic Publishers, Particle Technology Series, Netherlands, 2002.

Mat. Sci. Eng. A, 344:45–56, 2003. 72. P. Zhang, and S. Rohani. On-line optimal control of a seeded batch cooling crystallizer. Chem. Eng. , 58:1887–1896, 2003. Chapter 3 In Situ Optical Sensing and State Estimation for Control of Surface Processing Rentian Xiong and Martha A. 1 Introduction Measuring surface properties during modification is challenging, since the surface cannot be directly contacted, as that would disrupt the surface being modified. Calibration and pilot wafers can be used to characterize a process, by performing measurements during [2] or after [1] surface modification.

R. C. Haggard, G. Irons, and R. Bullock. HVOF particle flow field characteristics. In Thermal spray industrial applications, Proceedings of the 7th national thermal spray conference, pages 319–324, Boston, Massachusetts, 1994. 66. Tecnar Automation. DPV-2000 Reference Manual. 67. E. Turunen, T. -P. Hannula, A. Vaidya, A. Kulkarni, J. Gutleber, S. Sampath, and H. Herman. On the role of particle state and deposition procedure on mechanical, tribological and dielectric response of high velocity oxy-fuel sprayed alumina coatings.

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