Applied Mathematicsematics

Electron Kinetics and Applications of Glow Discharges (NATO by Uwe Kortshagen, Lev D. Tsendin

By Uwe Kortshagen, Lev D. Tsendin

This publication resulted from the NATO complicated examine Workshop on “Electron Kinetics and functions of Glow Discharges,” held in St. Petersburg, Russia, on may well 19-23, 1997. Glow discharges have discovered frequent functions in lots of technological strategies from the manufacture of semiconductors, to contemporary advancements in na- know-how, to the normal fields of fuel lasers, and discharge lamps. for that reason, the curiosity within the physics of glow discharges has skilled yet one more resurgence of curiosity. whereas the non-equilibrium personality of glow discharges is greatly permitted, the opinion nonetheless prevails that the most gains will be captured by way of fluid versions, and that kinetic remedies are just required for the certainty of refined info. The erroneousness of this trust is proven through the failure of fluid types to explain many simple gains of glow discharges resembling, for example, electrode phenomena, striations, and collisionless heating results. An sufficient description of glow discharges hence needs to be of kinetic nature.

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This allowed one to use a model based on solution of the Boltzmann equation in the two-term approximation in assumption that the EDF depends on the radial coordinate only through its dependence on the total electron energy (including the potential energy in the radial electric field) 14,15 . Our results demonstrate that applicability of such model to CF4 discharge (at low RN) is quite doubtful. 13Torr). The calculations have been made taking into account the non-equilibrium ion diffusion. Figure 7a shows F(v p , v z ) as a tree-dimensional surface, while in Figure.

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The most often applied approximation concludes in neglecting the spatial non-uniformity of plasma, when one can neglect the second Electron Kinetics and Application of Glow Discharges Edited by U. Kortshagen and L. D. Tsendin, Plenum Press, New York, 1998 37 term in (1). However, this approach is valid when the characteristic dimension L of plasma non-uniformity exceeds the electron energy relaxation length Λ e . :L >> Λ e . When the opposite relation is valid the approximation of spatial uniformity becomes incorrect.

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